tectra is offering a range of thickness measurment devices to control your deposition process. From our own low cost Quartz Crystal Microbalance (MTM-10) to the well known devices from Intellemetrics ranging from Rate Monitor IL150 to Optical insitu Monitors of the IL5xx range
The MTM-10 quartz crystal monitor system is a small reliable system for measuring film thickness during deposition. It is intended for manual control of the deposition process. The controller is capable of storing physical properties for two different material and two tooling factors. Both the UHV and HV versions use the same 6 MHz oscillator and high accuracy quartz microbalance controller, offering a resolution of 0,1 nm (at 0.5 g/cm³ density x tooling factor 2). The update rate is 5 Hz.
tectra is offering a range of thickness measurment devices to control your deposition process. From own low cost Quartz Crystal Microbalance (MTM-10) to the well known devices from Intellemetrics ranging from Rate Monitor IL150 to Optical insitu Monitors of the IL5xx range
The MTM-10 quartz crystal monitor system is a small reliable system for measuring film thickness during deposition. It is intended for manual control of the deposition process. The controller is capable of storing physical properties for two different material and two tooling factors. Both the UHV and HV versions use the same 6 MHz oscillator and high accuracy quartz microbalance controller, offering a resolution of 0,1 nm (at 0.5 g/cm³ density x tooling factor 2). The update rate is 5 Hz.
> Download data sheet
The IL150 Quartz Crystal Growth Rate Monitor from Intellemetrics is an eight layer monitor that can interface to two sensor heads and provides RS232 communication. Resolution is 0.1nm for most of the materials and the unit is extremely robust making it ideal for sputter applications. Thickness and rate are calculated from user supplied data on density and acoustic impedance of the film material. Data for up to eight materials is stored in non volatile memory.
Two sensor heads can be attached to the unit and used either as back-up or, alternatively, as the primary sensor for the particular film being deposited. The user can also specify a tooling factor to compensate for differences in detector/substrate geometry.
Deposition may be automatically terminated at a specified thickness by remote operation of a shutter.
The IL150 Quartz Crystal Growth Rate Monitor from Intellemetrics is an eight layer monitor that can interface to two sensor heads and provides RS232 communication. Resolution is 0.1nm for most of the materials and the unit is extremely robust making it ideal for sputter applications. Thickness and rate are calculated from user supplied data on density and acoustic impedance of the film material. Data for up to eight materials is stored in non volatile memory.
Two sensor heads can be attached to the unit and used either as back-up or, alternatively, as the primary sensor for the particular film being deposited. The user can also specify a tooling factor to compensate for differences in detector/substrate geometry.
Deposition may be automatically terminated at a specified thickness by remote operation of a shutter.
> Download data sheet
