SYSTEMS
General purpose high-vacuum coating systems. The modular systems can be configured according to the vacuum coating application.
Mini Coater
The Mini Coater (MICO) can be configured e.g. with thermal evaporation and electron beam evaporation. Extremely simple to use and with short cycle times (air-vacuum-air), this system is ideal for rapid vacuum prototyping and small scale thin film deposition; an indispensible tool for academic and industrial, research and teaching laboratories.
The bell-jar configuration is extremely versatile and lends itself easily to applications such as coating by evaporation (thermal and e-beam), magnetron sputtering and plasma decomposition (RF, microwave and DC). Plasma options may also be used for etching and plasma study / demonstration.
*Courtesy of GS Glovebox Systemtechnik GmbH
> Download data sheet
Sputter Coater
The Sputter Coater (SPUCO) is a modular system especially designed for deposition process using sputter magnetrons, but can easily be combined with thermal evaporators and electron beam evaporators.
SYSTEMS
General purpose high-vacuum coating systems. The modular systems can be configured according to the vacuum coating application.
Mini Coater
The Mini Coater (MICO) can be configured e.g. with thermal evaporation and electron beam evaporation. Extremely simple to use and with short cycle times (air-vacuum-air), this system is ideal for rapid vacuum prototyping and small scale thin film deposition; an indispensible tool for academic and industrial, research and teaching laboratories.
The bell-jar configuration is extremely versatile and lends itself easily to applications such as coating by evaporation (thermal and e-beam), magnetron sputtering and plasma decomposition (RF, microwave and DC). Plasma options may also be used for etching and plasma study / demonstration.
*Courtesy of GS Glovebox Systemtechnik GmbH
> Download data sheet
Sputter Coater
The Sputter Coater (SPUCO) is a modular system especially designed for deposition process using sputter magnetrons, but can easily be combined with thermal evaporators and electron beam evaporators.